Mars 4410 Lite is a manual loading and unloading device for detecting dislocations on SiC wafer substrates, facing microtubules on the surface. The device adopts optical microscopy imaging technology with differential interference difference, which can perform full film scanning and collect complete data, and automatically output wafer distribution maps.
Product parameters:
Application scope: Analysis of microtubules on the surface of SiC substrates and dislocation detection after corrosion
Measurable chip size: Supports 6 and 8 inches
Film transmission method: Manual loading and unloading (can be upgraded to automatic loading and unloading)
Contact:
Company Email：service@zdkfh-ie.com
Contact Number：0351--6523746
